The automatic matching network changes the impedance of the plasma chamber to 50 ohms to reach the maximum power from the generator to the chamber. The Basafan automatic matching networks perform their operation in three independent modes. The automatic mode continuously compensates the impedance variation of the plasma enclosure. The manual mode allows the operator to change the matching capacitance values during the process. In the preset mode, the operator can automatically adjust the capacitance values close to the complete matching condition at the outset so that the matching is performed faster.
The various parameters can be adjusted and have their performance observed via the front panel of the controller system and the VGA connections.
Some of special applications of this device are plasma production for various uses, such as the different stages of deposition (cleaning, etching, sputtering, etc.) as well as the fabrication of microelectronics components in nanotechnology field.
All RF generator and match box models come with 18 months guarantees
Features and capabilities
• Automatic matching of a wide range of impedances
• Control/display of all parameters
• Complete remote control capability
• Three operation modes: manual, automatic, and preset
• Digital display of capacitor locations and capacitor limitation alarms
• Location adjustment for the capacitors in manual mode using a digital rotary encoder in the control panel
• Unit control box installable in a rack
• Separate match box installable near the enclosure
• Reserve capacitor sets and inductor change tabs for increasing the load impedance range
• Adequate shielding for preventing radiation and EMI noise with necessary arrangements for protecting operator health.
Technical Specifications
Applied Power | 220 (200-240) V, 50 (50-60) Hz |
Maximum Input Power | 5000 W for standard load such as sputtergun (limitted to voltage 25KV and current 120 A) |
Frequency (MHz) | 13.56 |
Band width | 5% |
Matching network controlling connector | VGA |
Working modes | Manual, Automatic, Preset |
Matching speed | Depending on the load conditions between 5 and 30 seconds and when following the matching point is less than 5 seconds. |
Controller characteristics | when capacitors reach to the beginning and end, an alarm will be activated.
It has two steps (quick and accurate) for the tuning the location of capacitors.
It has a digital display of the location of capacitors.
It has a LED to show the mode.
It has a screw in priest mode to adjust capacitors location
adjustable gain of control loop for achieving optimal speed and stability |
Circuit topology | L Network |
Voltage-Current-Capacity of Capacitors | 25KV-120A-500PF |
Output impedance | A wide range.It performs matching for the standard sputtering cathode to a wide range. |
Working temperature | 10-40 C |
Cooling | Air-cooled via Fan and water |
Input Connector | 7/16 |
Output connector | direct connectiion |
Dimesiond | 18*48*25 (length*width*height) |
Weight | about 12 Kg |
Box Material | Aluminium |
Controller Technical Specifications
| Matching network controlling connector | VGA |
| Adjusting Capacitors | In three modes: Manual, Automatic, Preset |
Displays and outputs | A panel to display online location of capacitors.
Automatic deactivator of the device in the event of capacitors reaching first or end.
Analog output to show the impedance domain and phase. |
| On/Off switch | A button in the front panel of the device control box.The device has two parts. A box for impedance matching and a small box to control the system display. |
| Dimensions (cm) | 4.4*22*23 (length*width*height) |
| Weight | 1 Kg |
| Box material | Aluminium |
